Silica deep processing
PLASMA ETCHING OF DEEP, HIGHASPECT RATIO FEATURES INTO
2023年1月19日 We report in this paper the ability to etch very deep and highaspect features into fused silica using a reactive ion etching process We have demonstrated etches over 100 microns deep, with the capability of etching completely through 500 microns or thicker fused 2023年10月4日 Our technique uses a photocurable polydimethylsiloxane resin that is 3D printed into complex structures and converted to silica glass via deep ultraviolet (DUV) irradiation in an ozone environment The unique DUVozone Lowtemperature 3D printing of transparent silica glass 2023年3月30日 In this work, we proposed a defectfree multilevel fused silica glass microstructures fabrication route based on deep wet etching in BOE solution through a stepped mask with twostepDeep multilevel wet etching of fused silica glass microstructures in 2024年1月17日 In this work, a deep reinforcement learning (DRL) framework is presented to optimise silica aerogel microstructures modelled with the diffusionlimited cluster–cluster aggregation (DLCA)Deep reinforcement learning for microstructural optimisation of
Threedimensional printing of silica glass with submicrometer
2023年6月7日 Our process for 3D printing of silica glass consists of three main steps (Fig 1a–c): (1) drop casting of HSQ dissolved in organic solvents onto a substrate, (2) tracing the desired 3D shape in2024年6月30日 In this work, a phenomenological laser ablation model is developed to predict the ablation morphology of fused silica irradiated by femtosecond single and multiple pulses It couples the changes in the surface morphology of fused silica and the impact of the incubation Phenomenological modeling for femtosecond laser processing of This paper reports the etching process of fused silica by inductively coupled plasmas (ICP) for through glass via (TGV) applications Mixed C4F8 and Ar were used as etching gases in present experiments The effects of key factors, including etching gases, chamber pressure and Deep dry etching of fused silica using C4F8/Ar inductively coupled 2022年11月14日 In this paper, the ablation experiment of fused silica is carried out by ultrafast laser The processing mechanism is analyzed under the bust mode and nonburst modeHighquality laser processing of fused silica with bursts of ultrafast
Engraving Depth‐Controlled Nanohole Arrays on Fused
2023年1月29日 In this context, we explore ultrafast laser processing as a direct way to create deep air holes at the surface of a reference dielectric material, fused silica By “direct” we mean that one hole is fabricated by a singlestep 2023年12月1日 By improving the dispersion of other additives and polymers, rice huskderived silica leads to smoother processing and reduces energy consumption during manufacturing [157] One of the most remarkable aspects is the ability to tailor its properties through various surface modifications and treatmentsSilica extraction from rice husk: Comprehensive review and Other compounds that can be considered desilication products and important in processing high silica bauxites, are the hydrogarnet series of minerals; these are hydroxy substituted grossulars of the The surface deposits covered by lush vegetation,—particularly with deep roots—have the highest organic content Eg the Darling Chemical Processing of Bauxite: Alumina and Silica A simple fourelement fusedsilica lens is presented that has a focal length of 312 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools By applying an 85mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the Fusedsilica focusing lens for deep UV laser processing
Investigation of the modifications properties in fused silica by the
2022年12月6日 In this study, we demonstrate the elongated Type I modifications in fused silica with an axial length > 50 µm Such extended longitudinal dimensions were obtained by deep focusing radiation of a 2024年9月1日 The ban on the manufacture, supply, processing and installation of engineered stone benchtops, panels and slabs is in effect Learn more on the engineered stone ban web page What is crystalline silica? Silica is silicon dioxide, a naturally occurring and widely abundant mineral that forms the major component of most rocks and soils Crystalline silica and silicosis Safe Work Australia2023年10月4日 The emerging technology using photochemistrybased conversion process has sparked growing interests in the field of electronic engineering and hold tremendous potential for bridging the gap in lowtemperature 3D printing of silica glassesIt is found that deep ultraviolet (DUV) irradiation can effectively induce organic to inorganic transformation, creating a metal Lowtemperature 3D printing of transparent silica glass Science2016年8月3日 Deep multilevel wet etching of fused silica glass microstructures in BOE solution H et al Postprocessing of fused silica and its effects on damage resistance to nanosecond pulsed UV lasersAdvanced Mitigation Process (AMP) for Improving Laser
Deep reinforcement learning for microstructural optimisation of silica
2024年1月17日 In this work, a deep reinforcement learning (DRL) framework is presented to optimise silica aerogel microstructures modelled with the diffusionlimited cluster–cluster aggregation (DLCA) algorithm2023年1月19日 We report in this paper the ability to etch very deep and highaspect features into fused silica using a reactive ion etching process We have demonstrated etches over 100 microns deep, with the capability of etching completely through 500 microns or thicker fused silica material layers or substratesPLASMA ETCHING OF DEEP, HIGHASPECT RATIO FEATURES INTO FUSED SILICA2022年9月3日 Femtosecond laser processing of fused silica has been widely investigated Nevertheless, a theoretical model to provide effective and direct guidance to the actual processing is still essential By investigating the ablation threshold, depth, and crater shape of fused silica for femtosecond laser processing experimentally and numerically, a theoretical model is proposed Spatiotemporal probe into the femtosecond laser processing of fused silica(HF) solutions are the etching media of choice for deep etching into silicon dioxide substrates, but processing schemes become complicated and expensive for etching times greater than 1 hour due to the aggressiveness of HF migration through most masking materials We present here etching into fused silica more than 600 m deep while keepingμUltradeep fused silica glass etching with an HF resistant
Deep multilevel wet etching of fused silica glass microstructures
deep fused silica wet etching is a big challenge due to chemical stability of fused glass and extremely aggressive BOE properties Here, we propose a multilevel fused silica glass microstructures fabrication route based on deep wet etching through a stepped mask with just a one grayscale photolithography step2023年6月16日 Deep Processing – This takes two forms 3 Semantic processing, which happens when we encode the meaning of a word and relate it to similar words with similar meaning Deep processing involves elaboration Levels of Processing Theory (Craik Lockhart, 1972)2022年11月14日 Fused silica is considered as an essential material in industry because of its excellent physical, chemical and mechanical properties, and has been widely applied in many fields such as semiconductor, optical communication, aerospace, optics and so on [1, 2]Currently, many methods have been used to process fused silica, such as mechanical Highquality laser processing of fused silica with bursts of 2004年7月1日 A porous silica frame technology based on solgel processing may eliminate concerns associated with the lack of porosity in Meixner, Rahul Ganguli, Troy Robinson, DeYin Jeng, Mark W Morris, Satyabrata Ray Chaudhuri, and Brian J Grenon "Porous silica frame for deep ultraviolet lithography," Journal of Micro/Nanolithography Porous silica frame for deep ultraviolet lithography SPIE Digital
Working with crystalline silica and crystalline silica containing
This dust contains crystalline silica in a range of particle sizes, from very small (less than 10 micrometres [µm] in diameter) to larger particles that can be seen with the naked eye Crystalline silica particles that are less than 10 µm in diameter (Figure 1) are known as RCS as, when breathed in, they can travel deep into the lungsShe found that a number of students used deep processing strategies, without being told to Also, using the strategies wasn’t related to natural ability Instead, two key factors were related to their use: Setting a goal to really understand the material and learn something new Knowing some deep processing strategies that help you learn and Using Deep Processing Strategies to Master Any Subject2023年7月13日 This work proposes an environmentally safe and economically feasible method of waste coppernickel production slag utilization (Kola MiningMetallurgical Company, Nornickel, Kola Peninsula, Russia) This process involves the decomposition of slag by diluted solutions of sulfuric acid (7–10 wt% H2SO4) with a transfer in a solution of more than 70% silicon, 77% Deep Processing of Dump Slag from the CopperNickel IndustrySilica dust is a significant health hazard for workers Very small particles of silica dust cannot be seen under normal lighting or with the naked eye and stay airborne for long periods of time When airborne, workers can inhale the small silica dust particles deep into their lungs where they can lead to a range of respiratory diseases, including:Working with silica and silica containing products Safe Work
Deep multilevel wet etching of fused silica glass microstructures
deep fused silica wet etching is a big challenge due to chemical stability of fused glass and extremely aggressive BOE properties It is critically important to ensure high quality processing of fused glass microdevice elements, since it determine the optical, rheological, and mechanical parameters of the 2022年9月1日 Batalov et al [] used recoilatom implantation method to fabricate Fehyperdoped Si, which utilized Xe + ion beam to knock out Fe atoms from target to achieve incorporation of Fe into SiThe SIMS results showed that the utmost Fe concentration reached 17 × 10 22 cm –3 (4 nm depth), which was well beyond the equilibrium solubility of Fe in Si (3 × 10 16 cm –3 at Hyperdoped silicon: Processing, properties, and devices2010年11月1日 Request PDF Flexible 3D deep microstructures of silica glass by laserinduced backside wet etching The wellcontrolled fabrication of microtrenches including inclined features using normal Flexible 3D deep microstructures of silica glass by laser 2021年10月1日 In recent years, there is an increasing demand for highprecision deepmicrochannels processing of transparent, hard and brittle materials in the fields of microfluidic device manufacturing, electronic packaging and related industries [1], [2]Among such transparent and hard materials, fused silica has the characteristics of small coefficient of expansion, high Fabrication of millimeterscale deep microchannels in fused silica
Surface roughening of ground fused silica processed by
2015年6月30日 This transparent material shows excellent chemical and mechanical properties, making it an ideal material for the highenergy laser systems, military devices, and deepsea technology devices However, traditional mechanical processing methods used to fabricate fused silica inevitably lead to subsurface damage (SSD) [3], [4]2023年7月20日 A noncontact energy field processing method based on laser shows promise for manufacturing of optical components with high damage resistance to laser Fused silica optics, a kind of optics which is widely used in highenergy laser system, its performance and life have been limited by the laserinduced damage caused by processing defectsLaserbased defect characterization and removal process for 2024年7月1日 However, with continuous processing, these islands tend to grow towards nonregular nanostructure patern which saturates the total roughness In addition, the energy dispersive Xray spectroscopy (EDS) comparison of deepablated and nontreated surfaces shows the composition changes in the material (Fig 10)Surface roughness control in deep engraving of fused silica using 2012年2月14日 This processing scheme will contribute to the fabrication of transparent biological devices [25] Steingoetter I and Fouckhardt H 2005 Deep fused silica wet etching using an Aufree and stressreduced sputterdeposited Cr Ultradeep fused silica glass etching with an HFresistant
Optimization of Laserinduced Deep Etching for TGV IEEE Xplore
laserinduced deep etching (LIDE) is a promising technology for efficient and costeffective through glass via (TGV) manufacturing In this paper, the effect of nine independently adjustable parameters of LIDE on the TGV properties using ultrashort pulsed lasers was experimentally investigated Furthermore, the influence of these parameters on the processing is explained by 2012年3月1日 Microfluidic and optical sensing platforms are commonly fabricated in glass and fused silica (quartz) because of their optical transparency and chemical inertness Hydrofluoric acid (HF) solutions are the etching media of choice for deep etching into silicon dioxide substrates, but processing schemes become complicated and expensive for etching times Ultradeep fused silica glass etching with an HFresistant 2022年1月23日 Beside the processing behaviour of the main constituents of bauxite such as hydrated alumina and silica minerals, the Chapter covers the impact of other constituents, such as titania, iron (PDF) Chemical Processing of Bauxite: Alumina and Silica Minerals 2023年3月30日 Here, we propose a multilevel fused silica glass microstructures fabrication route based on deep wet etching through a stepped mask with just a one grayscale photolithography stepDeep multilevel wet etching of fused silica glass
Highquality laser processing of fused silica with bursts of
2022年11月14日 Fused silica is considered as an essential material in industry because of its excellent physical, chemical and mechanical properties, and has been widely applied in many fields such as semiconductor, optical communication, aerospace, optics and so on [1, 2]Currently, many methods have been used to process fused silica, such as mechanical 2023年10月4日 The emerging technology using photochemistrybased conversion process has sparked growing interests in the field of electronic engineering and hold tremendous potential for bridging the gap in low Lowtemperature 3D printing of transparent silica 2024年9月1日 The ban on the manufacture, supply, processing and installation of engineered stone benchtops, panels and slabs is in effect Learn more on the engineered stone ban web page What is crystalline silica? Silica is silicon dioxide, a naturally occurring and widely abundant mineral that forms the major component of most rocks and soils Crystalline silica and silicosis Safe Work AustraliaA simple fourelement fusedsilica lens is presented that has a focal length of 312 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools By applying an 85mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the Fusedsilica focusing lens for deep UV laser processing
Figure 2 from Optimization of Laserinduced Deep Etching for
DOI: 101109/ICEPT590182023 Corpus ID: ; Optimization of Laserinduced Deep Etching for TGV Fabrication in Fused Silica @article{Liu2023OptimizationOL, title={Optimization of Laserinduced Deep Etching for TGV Fabrication in Fused Silica}, author={Jingli Liu and Chenhui Xia and Xuefei Ming and Chunyan Yin}, journal={2023 24th 2022年12月6日 In this study, we demonstrate the elongated Type I modifications in fused silica with an axial length > 50 µm Such extended longitudinal dimensions were obtained by deep focusing radiation of a Investigation of the modifications properties in fused silica by the Other compounds that can be considered desilication products and important in processing high silica bauxites, are the hydrogarnet series of minerals; these are hydroxy substituted grossulars of the The surface deposits covered by lush vegetation,—particularly with deep roots—have the highest organic content Eg the Darling Chemical Processing of Bauxite: Alumina and Silica 2023年1月19日 We report in this paper the ability to etch very deep and highaspect features into fused silica using a reactive ion etching process We have demonstrated etches over 100 microns deep, with the capability of etching completely through 500 microns or thicker fused silica material layers or substratesPLASMA ETCHING OF DEEP, HIGHASPECT RATIO FEATURES INTO FUSED SILICA
Advanced Mitigation Process (AMP) for Improving Laser
2016年8月3日 Deep multilevel wet etching of fused silica glass microstructures in BOE solution H et al Postprocessing of fused silica and its effects on damage resistance to nanosecond pulsed UV lasers